Author Affiliations
Abstract
In Situ Devices Center, Shanghai Key Laboratory of Multidimensional Information Processing, East China Normal University, Shanghai 200241, China
Advanced electronic materials are the fundamental building blocks of integrated circuits (ICs). The microscale properties of electronic materials (e.g., crystal structures, defects, and chemical properties) can have a considerable impact on the performance of ICs. Comprehensive characterization and analysis of the material in real time with high-spatial resolution are indispensable. In situ transmission electron microscope (TEM) with atomic resolution and external field can be applied as a physical simulation platform to study the evolution of electronic material in working conditions. The high-speed camera of the in situ TEM generates a high frame rate video, resulting in a large dataset that is beyond the data processing ability of researchers using the traditional method. To overcome this challenge, many works on automated TEM analysis by using machine-learning algorithm have been proposed. In this review, we introduce the technical evolution of TEM data acquisition, including analysis, and we summarize the application of machine learning to TEM data analysis in the aspects of morphology, defect, structure, and spectra. Some of the challenges of automated TEM analysis are given in the conclusion.Advanced electronic materials are the fundamental building blocks of integrated circuits (ICs). The microscale properties of electronic materials (e.g., crystal structures, defects, and chemical properties) can have a considerable impact on the performance of ICs. Comprehensive characterization and analysis of the material in real time with high-spatial resolution are indispensable. In situ transmission electron microscope (TEM) with atomic resolution and external field can be applied as a physical simulation platform to study the evolution of electronic material in working conditions. The high-speed camera of the in situ TEM generates a high frame rate video, resulting in a large dataset that is beyond the data processing ability of researchers using the traditional method. To overcome this challenge, many works on automated TEM analysis by using machine-learning algorithm have been proposed. In this review, we introduce the technical evolution of TEM data acquisition, including analysis, and we summarize the application of machine learning to TEM data analysis in the aspects of morphology, defect, structure, and spectra. Some of the challenges of automated TEM analysis are given in the conclusion.
Journal of Semiconductors
2022, 43(8): 081001
作者单位
摘要
燕山大学 电气工程学院 河北省测试计量技术及仪器重点实验室,河北秦皇岛066004
为克服单一卫星传感器成像的不足,提出了基于密集连接网络的合成孔径雷达(SAR)与多光谱影像的融合算法。首先分别对SAR影像与多光谱影像进行预处理,使用双三次插值法重采样到同一空间分辨率下,然后使用密集连接网络来分别提取影像的特征图,并采用区域能量最大的融合策略将深度特征进行融合,将融合图像输入到预训练的解码器中进行重构,获得最终融合影像。实验采用哨兵1号SAR影像、Landsat-8影像和高分1号卫星影像进行验证,并与基于成分替换、基于多尺度分解和基于卷积神经网络的代表性方法进行对比试验。实验结果表明,基于密集连接网络的融合算法在多尺度结构相似度指标上的精度高达0.930 7,在其他多种评价指标上也都优于其他融合算法,SAR影像的细节信息和多光谱影像的光谱信息得到很好的保留。
合成孔径雷达 图像融合 密集连接网络 多光谱 synthetic aperture radar image fusion densely connected network multispectral 
光学 精密工程
2021, 29(5): 1145
Author Affiliations
Abstract
1 Shanghai Key Laboratory of Multidimensional Information Processing, East China Normal University, Shanghai 200241, China
2 Changjiang Electronics Integrated Circuit (Shaoxing) Co., Ltd, Shaoxing 312000, China

Non-volatile memory (NVM) devices with non-volatility and low power consumption properties are important in the data storage field. The switching mechanism and packaging reliability issues in NVMs are of great research interest. The switching process in NVM devices accompanied by the evolution of microstructure and composition is fast and subtle. Transmission electron microscopy (TEM) with high spatial resolution and versatile external fields is widely used in analyzing the evolution of morphology, structures and chemical compositions at atomic scale. The various external stimuli, such as thermal, electrical, mechanical, optical and magnetic fields, provide a platform to probe and engineer NVM devices inside TEM in real-time. Such advanced technologies make it possible for an in situ and interactive manipulation of NVM devices without sacrificing the resolution. This technology facilitates the exploration of the intrinsic structure-switching mechanism of NVMs and the reliability issues in the memory package. In this review, the evolution of the functional layers in NVM devices characterized by the advanced in situ TEM technology is introduced, with intermetallic compounds forming and degradation process investigated. The principles and challenges of TEM technology on NVM device study are also discussed.

Journal of Semiconductors
2021, 42(1): 013102
作者单位
摘要
燕山大学电气工程学院, 河北省测试计量技术及仪器重点实验室, 河北 秦皇岛 066004
气溶胶光学厚度(AOD)是气溶胶浓度和大气浊度的重要表征参数。 通过遥感手段实现大气气溶胶光学厚度的反演是大气监测与治理过程中的重要方式, 其中遥感反演AOD的重点和难点是如何选择适合卫星传感器成像特点的方法和符合研究区域的气溶胶类型。 针对传统暗目标法无法直接应用于高分四号(GF-4)卫星多光谱遥感数据的问题, 通过研究得出了GF-4卫星多光谱数据中红、 蓝波段等效地表反射率的分布和两者之间的线性关系, 结合AOD反演原理改进暗目标法使其适用于GF-4卫星多光谱遥感数据; 分析6S辐射传输模型输入参数中气溶胶类型对AOD反演精度的影响, 结果表明气溶胶类型是影响AOD高精度反演的关键要素之一; 利用粒子群(PSO)聚类算法对京津冀地区气溶胶特性实测样本进行聚类分析, 通过分析各个气溶胶类型聚类结果的占比和半衰期变化情况, 最终确定聚类得到的C1、 C4型和6S模型内置的大陆型气溶胶类型进行京津冀地区的AOD反演。 为了验证不同气溶胶类型AOD反演结果的精度, 将反演结果与MODIS气溶胶产品和气溶胶自动观测网(AERONET)地基站点数据进行对比验证, 通过相关系数、 绝对误差等评价标准对不同气溶胶类型的适用性和特点进行评价。 实验结果表明, 以细粒子为主导的C4型气溶胶更满足京津冀地区夏秋两季的气溶胶特点, 与AERONET地基数据的一致性较好, 进一步证明了PSO聚类算法能够有效减小气溶胶类型的差异对AOD反演精度的影响。
气溶胶 GF-4卫星多光谱数据 京津冀地区 PSO聚类算法 Aerosol GF-4 satellite multispectral data Beijing-Tianjin-Hebei region PSO clustering algorithm 
光谱学与光谱分析
2020, 40(11): 3321
作者单位
摘要
燕山大学河北省测试计量技术与仪器重点实验室, 河北 秦皇岛 066004
三维荧光光谱法在研究多环芳烃(PAHs)类物质的荧光信息时起到了重要作用。 多环芳烃类物质具有致癌性, 难降解性, 多由尾气排放, 垃圾焚烧产生, 危害着人类健康及环境, 因此人们不断探索对多环芳烃检测的方法。 实验选取多环芳烃中的苊和萘作为检测物质, 利用FLS920荧光光谱仪, 为避免荧光光谱仪本身产生的瑞利散射影响, 设置起始的发射波长滞后激发波长40 nm, 设置扫描的激发波长(λex)范围为: 200~370 nm, 发射波长(λem)范围为: 240~390 nm, 对多环芳烃进行荧光扫描获取荧光数据, 采用三维荧光光谱技术结合平行因子算法对混合溶液中的苊和萘进行定性定量分析。 实验选用的苊和萘均购于阿拉丁试剂官网, 配制浓度为10 mg·L-1的一级储备液, 再将一级储备液稀释, 得到苊和萘浓度为0.5, 1, 1.5, 2, 2.5, 3, 3.5, 4和4.5 mg·L-1的二级储备液, 并将苊和萘进行混合。 在进行光谱分析前需要对苊和萘的光谱进行预处理, 采用空白扣除法扣除拉曼散射的影响, 并采用集合经验模态分解(EEMD)消除干扰噪声。 实验测得苊存在两个波峰, 位于λex=298 nm, λem=324/338 nm处, 萘存在一个波峰, 位于λex=280 nm, λem=322 nm处。 选用的PARAFAC算法对组分数的的选择很敏感, 因此采用核一致诊断法预估组分数, 估计值2和3的核一致值都在60%以上, 分别对混合样品进行了2因子和3因子的PARAFAC分解, 将分解后得到的激发发射光谱数据和各组分浓度数据进行归一化处理, 并绘制光谱图, 与归一化处理后的真实的激发发射光谱图和各组分浓度图进行对比。 同时将PARAFAC得到的混合样本的预测浓度, 通过计算回收率(R)和均方根误差(RMSEP)来判定定量分析的准确度。 选择2因子时, 各混合样品中苊和萘拟合度为95.7%和96.7%, 平均回收率分别为101.8%和98.9%, 均方根误差分别为0.018 7和0.031 6; 选择3因子时, 各混合样品中苊和萘拟合度为95.3%和95.8%, 平均回收率分别为97%和102.5%, 均方根误差分别为0.033和0.116, 由三项指标可得选用2因子进行定性定量分析的效果明显好于选用3因子。 分析实验结果表明, 基于三维荧光光谱法和PARAFAC算法对混合样品进行定性定量分析, 能够有效的判定混合样品的类别, 同时能够成功的预测出混合样品的浓度。
三维荧光光谱 多环芳烃 集合经验模态 平行因子算法 Three-dimensional fluorescence spectroscopy Pdycyclic aromatic hydrocarbons EEMD PARAAFAC 
光谱学与光谱分析
2020, 40(2): 494
Author Affiliations
Abstract
1 Shanghai Key Laboratory of Multidimensional Information Processing, Department of Electronic Engineering, East China Normal University, Shanghai 200241, China
2 Laboratory of Micro-Nano Photonic and Optoelectronic Materials and Devices, Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Two-dimensional (2D) transition metal dichalcogenides alloys are potential materials in the application of photodetectors over a wide spectral range due to their composition-dependent bandgaps. The study of bandgap engineering is important for the application of 2D materials in devices. Here, we grow the Mo1-xWxSe2 alloys on mica, sapphire and SiO2/Si substrates by chemical vapor deposition (CVD) method. Mo1-xWxSe2 alloys are grown on the mica substrates by CVD method for the first time. Photoluminescence (PL) spectroscopy is used to investigate the effects of substrates and interlayer coupling force on the optical bandgaps of as-grown Mo1-xWxSe2 alloys. We find that the substrates used in this work have an ignorable effect on the optical bandgaps of as-grown Mo1-xWxSe2. The interlayer coupling effect on the optical bandgaps of as-grown Mo1-xWxSe2 is larger than the substrates effect. These findings provide a new way for the future study of the growth and physical properties of 2D alloy materials.
Journal of Semiconductors
2019, 40(6): 062005
作者单位
摘要
燕山大学电气工程学院河北省测试计量技术及仪器重点实验室, 河北 秦皇岛 066004
基于荧光检测机理,将平行因子与支持向量机(SVM)算法相结合,对多环芳烃中的苊、芴和萘进行检测。将荧光光谱数据预处理后作为训练集,输入到粒子群优化的SVM算法中建立分类模型;利用核一致性分析、残差平方和分析以及迭代次数分析方法确定成分数;采用得到的最佳成分数进行平行因子分解,将得到的发射载荷矩阵作为测试集输入到SVM的分类模型中,分类正确率为100%,最终得到苊、芴和萘的回收率分别为100.45%±6.25%、100.10%±6.39%和95.07%±7.46%。所用算法避免了人为操作增加的时间复杂性及主观因素造成的误差,为多环芳烃的荧光检测提供了一种新方法。
光谱学 平行因子 支持向量机(SVM) 多环芳烃检测 
光学学报
2019, 39(5): 0530002
作者单位
摘要
昆明理工大学机电工程学院, 云南 昆明 650500
为实现复杂背景下裂纹目标的有效检测,提出一种融合小波边缘检测与多尺度结构化森林的裂纹分割方法,以提高裂纹检测稳健性。该方法利用多幅裂纹图像和人工标注结果提取裂纹图像特征通道并离散化映射标准结果;利用三角滤波器和降采样方法获取常规和相关性候选特征;并将该特征与离散化后的标签进行结构化森林分类器的训练和验证,进而获得多个尺度的裂纹分割。在776幅结构体裂纹图像和600幅钢梁裂纹图像数据集上进行实验,结果表明,相比于单一多尺度结构化森林方法和其他几种分割方法,本文方法能够在较短的时间内获得最高的分割精度。
机器视觉 表面裂纹分割 多尺度结构化森林 反对称双正交小波变换 半重构 模极大值边缘检测 
光学学报
2018, 38(8): 0815024
作者单位
摘要
1 中国科学院遥感与数字地球研究所, 北京 100101
2 中国科学院大学, 北京 100049
3 吉林大学, 吉林 长春 130012
层状硅酸盐是火星表面含水矿物的主要存在形式之一, 也是比较火星不同沉积物和水蚀作用程度的指示矿物, 因此构建其识别模型对研究火星的地质演化极其重要。 短波红外和热红外谱段对矿物的基团、 离子光谱响应机理不同, 具有不同的识别优势, 然而国内外联合两者识别层状硅酸盐矿物则鲜有研究。 基于USGS光谱库数据, 面向火星探测器紧凑型侦查成像光谱仪(CRISM)和热辐射成像系统(THEMIS), 在层状硅酸盐的光谱响应机理研究基础之上, 分别构建短波红外识别模型与热红外模型, 进而结合短波红外和热红外谱段, 基于Fisher判别分析构建层状硅酸盐的综合识别模型。 交叉验证表明, 综合模型识别精度优于短波红外模型和热红外模型, 对90.6%的矿物样本正确识别, 有效提高了层状硅酸盐的识别精度。
高光谱 短波红外 热红外 层状硅酸盐 火星 Hyperspectral remote sensing Short-wave infrared Thermal infrared Phyllosilicate Mars 
光谱学与光谱分析
2016, 36(12): 3996
作者单位
摘要
College of Precision Instrum. and Optoelectron. Eng., Tianjin University, Tianjin 300072, CHN
SOFO system F-P fiber-optic sensors Fizeau interferometer White-light cross-correlator Fiber Bragg sensors Large structure monitoring 
半导体光子学与技术
2003, 9(2): 102

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